Dry mechanical vacuum pump (hereinafter referred to as dry mechanical pump) refers to the pump from the atmospheric pressure to start pumping gas, and can be pumped directly into the atmosphere, there is no oil or other working medium, and the ultimate pressure of the pump and oil seal type mechanical vacuum pump of the same magnitude or close to the mechanical vacuum pump.

 

At present, most mechanical vacuum pumps used in the vacuum industry are oil, water or other polymers and other fluids acting as the working medium of the pump, in the pump cooling, sealing, lubrication and other roles. With the development of science and technology and the expansion of vacuum application field, the original mechanical vacuum pump and its suction system have two urgent problems to be solved: first, the working medium reflux of the pump contaminate the pumped container, and this reflux will affect the quality and quantity of the product in many cases, and increase the maintenance cost of the equipment. Secondly, due to the reaction of some materials in the process of the vacuum pump medium seriously deteriorated, so that the pump can not work normally.

 

For the common oil-free vacuum system, although the oil-sealed vacuum pump with cold trap or adsorption trap and other accessories can be used to prevent the reflux, the problem cannot be completely solved and the system becomes more complex. By using proper type of dry mechanical vacuum pump, the ideal effect can be achieved.

 

The oil-free dry vacuum pump is widely used, mainly in the following aspects:

1. Semiconductor etching process. Corrosive gases and abrasive particles are often used or generated in these processes.

2. Polysilicon preparation process in low pressure chemical vapor deposition.

3. in addition to the semiconductor process, some of the process to produce particles, do not want the particles mixed with the pump oil, and hope the particles out of the pump, then use a certain type of dry mechanical vacuum pump can meet the requirements.

4. Used as the front pump of the general oil-free clean vacuum system to prevent oil pollution.

5. in the chemical industry, pharmaceutical industry, food industry distillation, drying, defoaming, packaging, to prevent organic solvent pollution, suitable for the use of dry vacuum pump.